Shangji Semiconductor Technology Co., Ltd. is a specialized manufacturer dedicated to the R&D and production of domestically developed semiconductor equipment in China. Its core product portfolio covers three key areas: Physical Vapor Deposition (PVD) for metal sputtering, Plasma-Enhanced Chemical Vapor Deposition (PECVD), and Plasma Dry Etching (ETCH). The company serves global customers in power devices, MEMS (Micro-Electro-Mechanical Systems), advanced packaging, compound semiconductors (III-V), RF (radio frequency), and IC (integrated circuits). Shangji’s equipment is widely recognized by customers for its excellent repeatability and stability, low failure rate, long service life, and ease of operation and maintenance.

As the company’s product applications continue to expand across diverse fields, Shangji Semiconductor selected SIPM/PLM in 2023 to achieve comprehensive management of product data. Through the joint efforts of the project team, the PLM implementation was successfully completed and rolled out across the organization. The team standardized project management and product development workflows, established document templates and design processes, and built a corporate standard parts library.

Using the Project module of the PLM system, internal departmental tasks were quantified and tracked daily via work reports. Within the Product module, electrical and mechanical components were managed separately. Integration with design software enabled automatic extraction of models and drawings to generate accurate materials and BOMs (Bill of Materials), significantly enhancing standardization and data accuracy. Furthermore, the ERP system directly reads material data, BOMs, and drawings from PLM, greatly improving both the efficiency and accuracy of data transfer.

With growing experience in system utilization and an expanding scope of practical management needs, Shangji Semiconductor recently purchased additional user licenses for SIPM/PLM.

【Company Background】

Shangji Semiconductor Technology Co., Ltd. is a specialized manufacturer dedicated to the R&D and production of domestically developed semiconductor equipment in China. Its core product portfolio covers three key areas: Physical Vapor Deposition (PVD) for metal sputtering, Plasma-Enhanced Chemical Vapor Deposition (PECVD), and Plasma Dry Etching (ETCH). The company serves global customers in power devices, MEMS (Micro-Electro-Mechanical Systems), advanced packaging, compound semiconductors (III-V), RF (radio frequency), and IC (integrated circuits). Shangji’s equipment is widely recognized by customers for its excellent repeatability and stability, low failure rate, long service life, and ease of operation and maintenance.

Shangji Semiconductor’s thin-film deposition technologies—including vanadium oxide (VOx) films, critical thin-film resistors in the RF domain such as tantalum nitride (TaN), TC-SAW SiO₂ film deposition, and high-vacuum getter film deposition—have all surpassed imported equipment in key technical specifications. These solutions are already in mass production at customer sites and hold a dominant market share.

In the power device market, Shangji’s front-side Hot Al equipment demonstrates exceptional performance in via-fill planarization, achieving an aspect ratio of 3:1—surpassing imported alternatives. Its backside metal sputtering (BSM) process delivers stable performance with nearly double the throughput of imported equipment. Notably, in the silicon carbide (SiC) segment, Shangji Semiconductor leads the market by a wide margin.

With over two decades of accumulated expertise in the IC sector, Shangji Semiconductor has developed deep technical proficiency in multiple areas, including high-aspect-ratio via filling, uniformity optimization, stress control, and the deposition of diverse and complex thin films.

Shangji’s PECVD and ETCH equipment offer viable domestic alternatives to imported tools in MEMS, RF, and power applications, delivering not only comparable but often superior process solutions.